专利名称：MICROELECTROMECHANICAL RESONATOR发明人：Charles I. Grosjean,Nicholas Miller,Paul M.
Hagelin,Ginel C. Hill,Joseph C. Doll,TrushalChokshi,Yi Zhang,Aaron Partridge,MarkusLutz
申请号：US15186510申请日：20160619
公开号：US20170093361A1公开日：20170330
专利附图：
摘要：In a MEMS device having a substrate and a moveable micromachined member, a
mechanical structure secures the moveable micromachined member to the substrate,thermally isolates the moveable micromachined member from the substrate andprovides a conduction path to enable heating of the moveable micromachined memberto a temperature of at least 300 degrees Celsius.
申请人：SiTime Corporation
地址：Sunnyvale CA US
国籍：US
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